Ultra high purity pressure gauge (EP grade)
Type: P820 series (316L type double melt)
 
Service intended
 
P820 series are specially designed for the ultra-high purity gas distribution system used in a semiconductor, electronic, medical, biotechnology and pharmaceutical industry.
 
Nominal diameter
 
50 (2") and 63 mm (2½")
 
Accuracy
 
Grade A (ASME B40.1) : 50 (2") and 63 mm (2½")
Grade B (ASME B40.1) : 50 (2") and 63 mm (2½")
 
Scale range
 
-0.1 ~ 0 to 0 ~ 28 MPa
 
Working pressure
 
Steady pressure : 75 % of full scale value
Fluctuating pressure : 67 % of full scale value
 
Working temperature
 
Ambient : -40 ~ 65 °C
Fluid : Max. 100 °C
 
Temperature effect
 
Accuracy at temperature above and below the reference temperature (20 ℃) will be effected by approximately
±0.4 % per 10 ℃ of full scale
 
 
Standard features
 
Pressure connection
 
Type 316L SS double melt electropolished low mount or center back mount
surface finish Ra≤0.25㎛
■ ¼" NPT male thread
■ VCR® male or female face seal fitting
 
Element
 
Type 316L SS
<6 MPa : C-type bourdon tube
≥6 MPa : Helical type bourdon tube
 
Case
 
Type 304SS, Electropolished with pressure relief
 
Cover and window
 
Twist-lock polycarbonate
 
Movement
 
Stainless steel
 
Dial
 
White aluminium with pointer stop pin
With black/red lettering, dual pressure scale (bar/psi)
 
Pointer
 
Black painted aluminium alloy
 
Helium leak rate
 
Tested to confirm leakage rates of less than
10 mbar • ℓ/sec
 
Certificates
 
ATEX Ex II GD c IIC TX
 
 
Download:  CATALOG